-booking.php- Cleanroom Control Center - Booking

This is the Booking and Request system for the equipment in the clean room of the MMC. If you have any doubt on how it works please consult the help.

A quick summary of the booking and request rules (only the most often abused part are here, please, refer to the complete clean-room regulation.)
- request can be made to ask a technician to perform a process for you if you are not authorised to use the machine. Select the process and then enter the thickness you need in the required unit and the number of wafer to process. To decrease the fee we will charge you, use the empty space in existing request - the run costs will be spread over all the users/wafers!
- booking machine before using is compulsory for all users (the booking list is used to generate statistics on machine's use, schedule maintenance and charge users). Please don't forget or your membership will be revoked...


Pending requests

Legend: Normal hoursAfter hourMachine freeMachine booked

Booking

TypePerson in charge Machine
for booking
Saturday, 20 Oct 2018 Sunday, 21 Oct 2018 Monday, 22 Oct 2018 Machine
for booking
Tuesday, 23 Oct 2018 Wednesday, 24 Oct 2018 Thursday, 25 Oct 2018 Machine
for booking
Friday, 26 Oct 2018 Saturday, 27 Oct 2018
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Characterization/TestChollet Franck Automatic goniometer Automatic goniometer Automatic goniometer
Chollet Franck Fizeau profilometer Fizeau profilometer Fizeau profilometer
Chollet Franck Scanning confocal profilometer Scanning confocal profilometer Scanning confocal profilometer
TypePerson in charge Machine
for booking
Saturday, 20 Oct 2018 Sunday, 21 Oct 2018 Monday, 22 Oct 2018 Machine
for booking
Tuesday, 23 Oct 2018 Wednesday, 24 Oct 2018 Thursday, 25 Oct 2018 Machine
for booking
Friday, 26 Oct 2018 Saturday, 27 Oct 2018
08091011121314151617181920 08091011121314151617181920 08091011121314151617181920 08091011121314151617181920 08091011121314151617181920 08091011121314151617181920 08091011121314151617181920 08091011121314151617181920
DepositionChollet Franck Oxidation furnace Oxidation furnace Oxidation furnace
EtchingChollet Franck Multi-material ICP-DRIE STS Multi-material ICP-DRIE STS Multi-material ICP-DRIE STS
Chollet Franck Silicon ICP-DRIE Alcatel Silicon ICP-DRIE Alcatel Silicon ICP-DRIE Alcatel
Chollet Franck Silicon ICP-DRIE SPTS Silicon ICP-DRIE SPTS Silicon ICP-DRIE SPTS

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