• Clean room
• Service
• My Account

• Booking
• Request
• Order

This is the Booking and Request system for the equipment in the clean room of the MMC. If you have any doubt on how it works please consult the help.

A quick summary of the booking and request rules (only the most often abused part are here, please, refer to the complete clean-room regulation.)
- request can be made to ask a technician to perform a process for you if you are not authorised to use the machine. Select the process and then enter the thickness you need in the required unit and the number of wafer to process. To decrease the fee we will charge you, use the empty space in existing request - the run costs will be spread over all the users/wafers!
- booking machine before using is compulsory for all users (the booking list is used to generate statistics on machine's use, schedule maintenance and charge users). Please don't forget or your membership will be revoked...

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This webpage has been updated on 22 January 2018.

A demonstration of Cleanroom Control Center
from MEMSCYCLOPEDIA.ORG